Large quantities of high-quality, ultra-long hexagonal crystal structure AlN whiskers with diameters from 1 to 3 μm and......

使用FEMAG晶体生长模拟仿真软件以及自主开发的PVT法有限元传质模块对全自动、双电阻加热物理气相沉积炉开展了AlN晶体生长工艺过......